Design & Electrode Manufacturing Technology

Design Technology

• ESC Electrode Design Technology (Performance)
  • LCD 1G ~ 8G ESC Electrode Design
    (About 30 Model)
  • High Power ESC(SUS, Al) Design
    (3G, 4.5G, 5.5G)
  • High Temperature ESC(SUS) Design
    (3G, 4.5G, 5.5G)

Patent & Specialized Technology

• Electrostatic Chuck reproducing method of TFT
  fabrication equipment (Patent 10-0908227)
• Large size Electrostatic Chuck and manufacturing
  method thereof (Patent 10-1189815)
• Constantly changing mask with lower electrode embossed pattern
  (Utility Model 20-0452471)
• Sintered ceramics DC port making (Patent Application) & clamping technology
• Completion of development of high-resolution powder material (Patent Application)
• Development of a high-quality sealant essential to enhance withstand voltage of plasma coating

Production Capacity

• Secure consistent quality at world-class level in manufacturing ESC for LCDs
  (About 10㎛ of flatness of ceramic surface)
• Large-area plasma coating system (3500 X 4500mm) Largest in Korea
• 1000 Class Cleanroom (150 pyeong)
  (Large heavy-duty vacuum oven, 3D inspection, packing)
• Recyclable equipment (cleaning, removal of thermal spray layers, repairs, manufacturing, etc.)