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Patent & Utility Model

  • Electrostatic Chuck reproducing method of TFT fabrication equipment (10-0908227)
  • Large size Electrostatic Chuck and manufacturing method thereof (10-1189815)
  • Lower Electrode Emboss Pattern Mask (Embosing Jig) (20-0452471)
  • Large size electrostatic manufacturing method for display boards and material with connection structure by thereof (10-1362074)
  • Base Materials for grinding of a large size electrostatic Chuck seating display boards (10-1496175)
  • Manufacturing method of feed-through (10-1558146)
  • Bipolar type electrostatic chuck manufacturing method (10-1934340)