ESC

Principles

When voltage is applied while two metal plates face each other, then the + electrode plate gets + electric charge and the ? electrode plate gets ? electric charge.
Then, the force of attraction is caused by the electric charges between the parallel plates, which is called Electrostatic Force).
ESC(Electro Static Chuck) is a key component that anchors glass in vacuum state only with the force of electrostatic discharge

Separated by Mono-Polar and Bi-Polar ESC according to the number of electrodes.